A Model for Antenna-Plasma Wave Co upling towards Control of Uniformity in Slot-Excited Microwave Discharges Daichi SAWADA, Akihiro TSUJI, Takanori KITSUDO, Yasuyoshi YASAKA, and Hiromasa TAKENO Department of Electrical and Electronic Engineering, Kobe University, 1-1 Rokkodai, Nada, Kobe 657-8501, Japan Exploration COMSOL in Modeling RLSATM CVD Processes Radial line slot antenna plasma source Plasma is sustained by 2.45 GHz EM wave distributed by antenna and propagating trough processing gas 3 . Author / Company / Division / Rev. / Date Physics background • SW-sustained discharges are structures which unify Multiphysics Coupling Simulation of Silicon Nitride CVD ...
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Плазменная антенна — Википедия Плазменная антенна — активно разрабатываемый тип радиоантенн, в которых вместо металлических проводников для приёма и передачи радиоволн используется ионизированный газ — плазма. A Radial Line Slot Antenna for an Elliptical Beam A radial line slot antenna (RLSA) with a quasi-elliptical aperture to create an elliptical beam is discussed in this paper. A simple feeding structure consisting of a coaxial feeder and two parasitic pins is designed to produce the feed pattern required for uniform illumination over the aperture. ... RLSA - Radial-Line Slot Antenna | AcronymFinder How is Radial-Line Slot Antenna abbreviated? RLSA stands for Radial-Line Slot Antenna. Radial Line Slot Antenna in Ka-band for Space Uses
The plasma source 22 of the system 10 may be a surface-wave plasma (SWP) source that includes a radial line slot antenna 24. The plasma source 22 may be energized by direct current, radio frequency, microwave energy, or other energy sources known to the art.
The Radial Line Slot Antenna 24, coupled to a microwave source, may be used to form a surface wave plasma. Details of the Radial Line Slot Antenna 24 in an SWP source are described in U.S. Pat. No. 8,114,245, hereby expressly incorporated herein by reference. In the plasma, if left unchecked, a majority of the produced electrons are excessively ... Design of Radial Line Slot Antennas at 8.3 GHz for Large ... A radial line slot antenna (RLSA) 400 mm in diameter is designed for a plasma source at 8.3 GHz as a candidate for a large area high density plasma source with a narrow process space. A RLSA with paired slots arrayed concentrically on its aperture is designed and applied to a plasma process system which does not need a magnetic field. Research - 東京工業大学 Our research themes are planar slotted waveguide antennas and electromagnetic theory. ... Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University. A Model for Antenna-Plasma Wave Co upling towards Control ...
Design of radial line slot antennas for millimeter wave…
Masahiro Horigome | Tokyo Electron, Tokyo | Electrical ... Fin extension doping for 10 nm front end of line technology requires ultra-shallow high dose conformal doping. In this paper, we demonstrate a new radial line slot antenna plasma source based ... Near-Field Distribution of Radial Line Slot Antenna for ...
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WO2010140526A1 - Plasma processing apparatus and power ... For example, Patent Document 1, RLSA (Radial Line Slot Antenna) system is disclosed, which is one of a microwave plasma processing apparatus. In RLSA device, disc-shaped dielectric window is provided in the ceiling surface of the processing chamber. Research - 東京工業大学
Abstract: The plasma reactor with radial line slot antenna (RLSATM), a planar microwave (2.45 GHz) plasma source, is used in etch and deposition technology, typically in reactive rich gaseous environment, and for processes that are sensitive to plasma damage. Besides a strict uniformity control, the plasma chemistry is TEL Announces Release of New Plasma Nitridation System ...